Surface cleaning using sputtering

A Monte Carlo computer program for the transport of energetic ions in amorphous targets

1980 • 4,625 citations

Surface Studies by Scanning Tunneling Microscopy

1982 • 4,521 citations

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

1969 • 3,398 citations

Sputtering by Particle Bombardment III

1991 • 2,230 citations

スパッタの理論 I 非晶質のスパッタ収量と多結晶ターゲット

1969 • 1,970 citations

Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation

1974 • 1,547 citations

Computer Simulation of Ion-Solid Interactions

1991 • 1,194 citations

Physical Properties and Interrelationships of Metallic and Semimetallic Elements

1964 • 920 citations

Low energy electrons and surface chemistry

1987 • 907 citations

Low-Energy Electrons and Surface Chemistry

1976 • 781 citations

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

1969 • 776 citations

Tridyn — A TRIM simulation code including dynamic composition changes

1984 • 610 citations

The depth resolution of sputter profiling

1979 • 594 citations

Methods of Surface Analysis

1977 • 526 citations

Electron Spectroscopy for Surface Analysis

1977 • 496 citations

Sputtering by ion bombardment theoretical concepts

1981 • 474 citations

Heats of Chemisorption of O₂, H₂, CO, CO₂, and N₂on Polycrystalline and Single Crystal Transition Metal Surfaces

1979 • 369 citations

Scattering of Low-Energy Noble Gas Ions from Metal Surfaces

1967 • 346 citations

Preparation of atomically clean surfaces of selected elements: A review

1982 • 345 citations

Sputtering of chemisorbed gas (nitrogen on tungsten) by low-energy ions

1974 • 317 citations

Recoil mixing in solids by energetic ion beams

1980 • 316 citations

Sputtering yield measurements

1981 • 282 citations

An analytical formula and important parameters for low-energy ion sputtering

1980 • 265 citations

Die Analyse monomolekularer FestkörperoberflÄchenschichten mit Hilfe der SekundÄrionenemission

1970 • 264 citations

Computer simulations of sputtering

1987 • 256 citations

The interaction of injected helium with lattice defects in a tungsten crystal

1972 • 254 citations

Application of the Ion Bombardment Cleaning Method to Titanium, Germanium, Silicon, and Nickel as Determined by Low-Energy Electron Diffraction

1958 • 220 citations

Untersuchungen zur Festkörperzerstäubung bei schiefwinkligem Ionenbeschuß polykristalliner Metalloberflächen im Energiebereich um 1 keV

1973 • 200 citations

Surface segregation and its relation to grain boundary segregation

1975 • 189 citations

Hydrogen trapping and transport in carbon

1989 • 161 citations

Beam-induced broadening effects in sputter depth profiling

1984 • 160 citations

Cone formation as a result of whisker growth on ion bombarded metal surfaces

1985 • 160 citations

On the role of Gibbsian segregation in causing preferential sputtering

1985 • 143 citations

Sputtering in the surface analysis of solids: A discussion of some problems

1976 • 140 citations

APPLIED ATOMIC COLLISION PHYSICS

1982 • 137 citations

Surface-layer composition changes in sputtered alloys and compounds

1977 • 135 citations

Computer simulation of atomic mixing during ion bombardment

1975 • 132 citations

A review of the wall problem and conditioning techniques for tokamaks

1980 • 117 citations

Computer simulation of two-component target sputtering

1985 • 116 citations

Depth of origin of sputtered atoms

1981 • 115 citations

Recoil implantation and ion-beam-induced composition changes in alloys and compounds

1979 • 104 citations

Coadsorption-Induced Azimuthal Ordering in Molecular Adsorbate Layers:<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:msub><mml:mrow><mml:mi mathvariant="normal">H</mml:mi></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math>O and N<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:msub><mml:mrow><mml:mi mathvariant="normal">H</mml:mi></mml:mrow><mml:mrow><mml:mn>3</mml:mn></mml:mrow></…

1981 • 99 citations

Evolve, a time-dependent monte carlo code to simulate the effects of ion-beam-induced atomic mixing

1981 • 97 citations

Sputtering of frozen gases

1987 • 96 citations

Sputtering Ion Source for Solids

1963 • 95 citations

Depth resolution in sputter profiling

1977 • 95 citations

Auger Electron Spectroscopy Studies of Sputter Deposition and Sputter Removal of Mo from Various Metal Surfaces

1972 • 93 citations

Depth-profiling of Cu-Ni sandwich samples by secondary ion mass spectrometry

1975 • 87 citations

Festkörperzerstäubung durch Ionenbeschuß

2007 • 87 citations

Round Robin computer simulation of ejection probability in sputtering

1989 • 86 citations

Surface modifications due to preferential sputtering

1982 • 85 citations

Sputtering—Surface changes induced by ion bombardment

1976 • 80 citations

Surface Cleaning by Cathode Sputtering

1960 • 79 citations

Ion beam induced desorption of surface layers

1980 • 77 citations

Binding energies in cubic metal surfaces

1973 • 75 citations

Investigation of the local atomic arrangement on surfaces using low-energy ion scattering

1985 • 75 citations

Study of Ion-Bombardment Damage on a Ge (111) Surface by Low-Energy Electron Diffraction

1965 • 74 citations

Studies of photon induced gas desorption using synchrotron radiation

1983 • 69 citations

Effect of oxygen on the sputtering of aluminium targets bombarded with argon ions

1973 • 66 citations

Recoil implantation from a thin source

1976 • 62 citations

Desorption of solid hydrogen by energetic protons, deuterons, and electrons

1973 • 61 citations

Sputtering of adsorbed layers by ion bombardment

1976 • 60 citations

The effect of bakeout temperature on the electron and ion induced gas desorption coefficients of some technological materials

1979 • 58 citations

Electron Diffraction and Surface Defect Structure

1977 • 56 citations

Bombardment induced surface damage in a nickel single crystal observed by ion scattering and leed

1973 • 54 citations

Conditioning of asdex by glow discharge

1980 • 52 citations

The influence of adsorption energies on ion impact desorption of surface layers

1979 • 50 citations

Sputtering of chemisorbed nitrogen from single-crystal planes of tungsten and molybdenum

1987 • 50 citations

Gas Discharge Cleaning of Vacuum Surfaces

1970 • 49 citations

The injection of inert gas ions into solids: Their trapping and escape

1980 • 49 citations

AUGER ELECTRON SPECTROSCOPY

1975 • 48 citations

Characterization of NBS Standard Reference Material 2135 for sputter depth profile analysis

1985 • 46 citations

A simple formula for low-energy sputtering yields

1985 • 44 citations

Impurity-quenched orientational epitaxy of Kr layers on Pt(111)

1986 • 42 citations

The study of sputtering effects in oxides and metal— Adsorbed-gas systems using combined analytical techniques

1979 • 39 citations

Influence of the impact angle on the depth resolution and the sensitivity in SIMS depth profiling using a cesium ion beam

1985 • 37 citations

Studies of surface composition of Ag-Au, Au-Cu, and Ag-Cu alloys after ion bombardment by Auger electron spectroscopy

1977 • 36 citations

A contribution to the investigation of ion impact desorption by ion scattering

1977 • 36 citations

Direct comparison of ion scattering and secondary ion emission as tools for analysis of metal surfaces

1974 • 36 citations

On the production and annealing of bombardment induced surface damage on a nickel (110) surface

1982 • 34 citations

Ion desorption spectrometry: A new method of surface investigation

1983 • 33 citations

Desorption phenomena

2005 • 33 citations

Preferential sputtering and radiation enhanced segregation in palladium-platinum alloys

1989 • 28 citations

A study of the sorption of CO on W and Ni single-crystal surfaces by ion scattering

1978 • 28 citations

Preferential sputtering and radiation enhanced segregation in palladium-platinum alloys

1989 • 28 citations

Secondary-ion mass spectrometry of organized organic model systems

1983 • 22 citations

Depth resolution in sputter profiling: Evidence against the sequential layer sputtering model

1978 • 22 citations

The role of energetic ion bombardment in silicon-fluorine chemistry

1987 • 22 citations

Hydrogen Trapping and Transport in Carbon

1989 • 19 citations

Ion impact desorption mechanisms and energy distributions

1982 • 18 citations

The effect of CO adsorption on ion and photon yields from ion bombarded metal surfaces

1980 • 18 citations

Ion Bombardment Induced Surface Damage in Tungsten and Molybdenum Single Crystals

1972 • 17 citations

Ion impact desorption and hydrogen release

1981 • 16 citations

Backscattering of excited hydrogen from Mo in the presence of oxygen

1978 • 14 citations

A combined fim, aes and LEED study of the structure and composition of ion bombarded tungsten surfaces

1975 • 14 citations

Desorption of neutral molecules from Al(6061) by electron and ion bombardment

1978 • 10 citations

Range distribution of low-energy nitrogen ions in metals

1984 • 10 citations

LV. The absorption of gases in vacuum-tubes, and allied phenomena

1916 • 8 citations

Particle reflection and ion-induced desorption from tungsten surfaces with chemisorbed nitrogen

1987 • 6 citations

The large electron positron storage ring preinjector vacuum systems: Design and performance

1987 • 3 citations

Forthcoming papers

1975 • 1 citations