A simple formula for low-energy sputtering yields

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

1969 • 3,398 citations

スパッタの理論 I 非晶質のスパッタ収量と多結晶ターゲット

1969 • 1,970 citations

Calculations of nuclear stopping, ranges, and straggling in the low-energy region

1977 • 781 citations

Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev

1961 • 771 citations

Sputtering Yields for Low Energy He+-, Kr+-, and Xe+-Ion Bombardment

1962 • 422 citations

An analytical formula and important parameters for low-energy ion sputtering

1980 • 265 citations

Sputtering by Ion Bombardment

1955 • 235 citations

Untersuchungen zur Festkörperzerstäubung bei schiefwinkligem Ionenbeschuß polykristalliner Metalloberflächen im Energiebereich um 1 keV

1973 • 200 citations

Heavy-ion range profiles and associated damage distributions

1972 • 191 citations

Heavy-ion sputtering yields of gold: Further evidence of nonlinear effects

1975 • 180 citations

Energy dependence of the sputtering yield of silicon bombarded with neon, argon, krypton, and xenon ions

1983 • 177 citations

Pure element sputtering yields using 500–1000 eV argon ions

1981 • 154 citations

Energy and fluence dependence of the sputtering yield of silicon bombarded with argon and xenon

1979 • 106 citations

Sputtering by particle bombardment. I. Physical sputtering of single‐element solids. Hg. von R. Behrisch. Topics in applied physics, vol. 47. Berlin/Heidelberg/New York: Springer‐Verlag 1981. X, 281 S., geb. DM 85,–.

1983 • 90 citations

Physical sputtering model for fusion reactor first-wall materials

1978 • 77 citations

The influence of surface structures on sputtering: Angular distribution and yield from faceted surfaces

1978 • 69 citations

Sputter-erosion and impurity emission from titanium and vanadium at low-energy ion bombardment

1978 • 60 citations

Surface Ejection in Single Crystal Sputtering

1975 • 48 citations

A new empirical formula for the sputtering yield

1982 • 40 citations

On the fluence dependence of the sputtering yield for low-energy noble gas ions

1982 • 22 citations

Thin-film sputtering yields for Fe, Cr, and an Fe-Cr alloy measured by proton-induced x rays

1979 • 11 citations

Auger electron spectroscopy in sputtering measurements: Application to low-energy Ar+ sputtering of Ag and Nb

1975 • 11 citations

Measurement of neutral and ion sputtering yields by matrix isolation spectroscopy

1981 • 9 citations

Sputtering yields of electrochemically deposited metal and metal oxide thin films

1982 • 6 citations