Computer simulation of two-component target sputtering

Sputtering by Particle Bombardment III

1991 • 2,230 citations

Selected Values of Thermodynamic Properties of Metals and Alloys

1963 • 1,518 citations

Sputtering studies with the Monte Carlo Program TRIM.SP

1984 • 891 citations

Tridyn — A TRIM simulation code including dynamic composition changes

1984 • 610 citations

Ion Implantation and Beam Processing

1984 • 455 citations

Sputtering of multicomponent materials: Elements of a theory

1982 • 224 citations

Mass effects on angular distribution of sputtered atoms

1979 • 111 citations

Evolve, a time-dependent monte carlo code to simulate the effects of ion-beam-induced atomic mixing

1981 • 97 citations

Sputtering of single and multiple component materials

1980 • 82 citations

The sputtering yield of typical impurity ions for different fusion reactor materials

1981 • 79 citations

Low energy light ion sputtering of metals and carbides

1980 • 75 citations

Computer simulation of the reflection of hydrogen and the sputtering of hydrogen from metal hydrides

1978 • 56 citations

Preferential sputtering of compounds due to light ion bombardment

1982 • 50 citations

Preferential sputtering of TiC and TiB2 coatings under D+ and 4He+ bombardment: Partial yields

1982 • 37 citations

Angular distributions and differential sputtering yields of binary compounds as a function of angle of incidence

1983 • 29 citations

Depth profiling of D implanted into Ti at different temperatures

1980 • 28 citations

Light Ion Sputtering of Metals and Low Z Compounds as Studied with the Monte-Carlo Code Trim

1984 • 24 citations

Sputtering of multicomponent materials

1984 • 12 citations

Sputtering of titanium carbide coatings under D+ and 4He+ ion bombardment: Total sputter yields and angular distribution

1981 • 9 citations

Zeitschriftenreferate

1983 • 2 citations