Silicon as a mechanical material

High-performance heat sinking for VLSI

1981 • 4,589 citations

Formulas for Stress and Strain

1976 • 1,944 citations

Mechanical Vibrations

1957 • 1,591 citations

A gas chromatographic air analyzer fabricated on a silicon wafer

1979 • 1,355 citations

Electrolytic Shaping of Germanium and Silicon

1956 • 1,070 citations

The resonant gate transistor

1967 • 1,064 citations

Anisotropic etching of silicon

1978 • 797 citations

Field Assisted Glass-Metal Sealing

1969 • 728 citations

Electropolishing Silicon in Hydrofluoric Acid Solutions

1958 • 623 citations

A batch-fabricated silicon accelerometer

1979 • 500 citations

Silicon semiconductor data

1969 • 419 citations

Glass Engineering Handbook

1984 • 410 citations

Measurement of Strains at Si-SiO2 Interface

1966 • 394 citations

Dynamic micromechanics on silicon: Techniques and devices

1978 • 384 citations

Chemical Etching of Silicon: IV . Etching Technology

1976 • 342 citations

Micromechanical Membrane Switches on Silicon

1979 • 317 citations

Fabrication of novel three-dimensional microstructures by the anisotropic etching of

1978 • 315 citations

Anisotropic Etching of Silicon

1969 • 310 citations

A Water-Amine-Complexing Agent System for Etching Silicon

1967 • 307 citations

Miniaturization of Tuning Forks

1968 • 302 citations

Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

1979 • 300 citations

Young’s modulus measurements of thin films using micromechanics

1979 • 297 citations

Deformation and fracture of small silicon crystals

1957 • 293 citations

Silicon Diffused-Element Piezoresistive Diaphragms

1962 • 265 citations

Chemical Etching of Silicon

1959 • 244 citations

High Frequency Recording with Electrostatically Deflected Ink Jets

1965 • 228 citations

Silicon Torsional Scanning Mirror

1980 • 222 citations

Formation Mechanism of Porous Silicon Layer by Anodization in HF Solution

1980 • 220 citations

Vertical Etching of Silicon at very High Aspect Ratios

1979 • 218 citations

The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water Solutions

1979 • 209 citations

High-resolution pattern replication using soft X rays

1972 • 208 citations

A monolithic capacitive pressure sensor with pulse-period output

1980 • 185 citations

Chemical Vapor Deposition of Single Crystalline β ‐ SiC Films on Silicon Substrate with Sputtered SiC Intermediate Layer

1980 • 179 citations

Engineering properties of selected ceramic materials

1966 • 170 citations

An IC Piezoresistive Pressure Sensor for Biomedical Instrumentation

1973 • 160 citations

Laser chemical technique for rapid direct writing of surface relief in silicon

1981 • 156 citations

Formation and Properties of Porous Silicon and Its Application

1975 • 156 citations

The Theory and Practice of Microelectronics

1968 • 154 citations

Properties of Thin Polyimide Films

1980 • 149 citations

Ink jet printing nozzle arrays etched in silicon

1977 • 143 citations

Electronic Properties of Crystalline Solids

1974 • 138 citations

Ethylene Diamine-Pyrocatechol-Water Mixture Shows Etching Anomaly in Boron-Doped Silicon

1971 • 138 citations

On etching very narrow grooves in silicon

1975 • 132 citations

A RESONANT-GATE SILICON SURFACE TRANSISTOR WITH HIGH-Q BAND-PASS PROPERTIES

1965 • 121 citations

Tensile Properties of Thin, Evaporated Gold Films

1960 • 115 citations

Optimization of the Hydrazine‐Water Solution for Anisotropic Etching of Silicon in Integrated Circuit Technology

1975 • 115 citations

Development of a miniature pressure transducer for biomedical applications

1979 • 110 citations

Structure of Porous Silicon Layer and Heat‐Treatment Effect

1978 • 107 citations

Integrated signal conditioning for silicon pressure sensors

1979 • 95 citations

Micromechanical accelerometer integrated with MOS detection circuitry

1982 • 93 citations

Micromechanical light modulator array fabricated on silicon

1977 • 91 citations

Electrochemically Controlled Thinning of Silicon

1970 • 85 citations

Fabrication and some applications of large-area silicon field emission arrays

1974 • 83 citations

An electrochemical P-N junction etch-stop for the formation of silicon microstructures

1981 • 82 citations

The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon Substrate

1968 • 82 citations

A gas chromatography system fabricated on a silicon wafer using integrated circuit technology

1975 • 80 citations

Low-Temperature Electrostatic Silicon-to-Silicon Seals Using Sputtered Borosilicate Glass

1972 • 72 citations

Dielectric Isolation: Comprehensive, Current and Future

1977 • 71 citations

Ink jet printing

1972 • 70 citations

Fabrication of an integrated, planar silicon ink-jet structure

1979 • 68 citations

The Fabrication of High Precision Nozzles by the Anisotropic Etching of (100) Silicon

1978 • 68 citations

Microminiature ganged threshold accelerometers compatible with integrated circuit technology

1972 • 66 citations

X-Ray Lithography: A Complementary Technique to Electron Beam Lithography

1973 • 65 citations

Mechanical Strength of Thin Films of Metals

1955 • 57 citations

The mirror-matrix tube: A novel light valve for projection displays

1975 • 56 citations

Correlation of the anisotropic etching of single−crystal silicon spheres and wafers

1975 • 55 citations

Dynamic Mirror Distortions in Optical Scanning

1972 • 54 citations

Thin-Film Laser-to-Fiber Coupler

1974 • 53 citations

Anodic Dissolution of N+ Silicon

1971 • 53 citations

Fabrication of a miniature 8K-bit memory chip using electron-beam exposure

1975 • 51 citations

Ethylene Diamine-Catechol-Water Mixture Shows Preferential Etching of p-n Junction

1969 • 50 citations

High-speed droplet migration in silicon

1976 • 45 citations

Preferentially etched diffraction gratings in silicon

1975 • 45 citations

Mechanical Properties of Vacuum-Deposited Gold Films

1964 • 43 citations

TELEVISION A New Schlieren Light Valve for Television Projection

1970 • 43 citations

The V-groove multijunction solar cell

1979 • 42 citations

A Novel Method for Fabrication of Ultrafine Metal Lines by Electron Beams

1972 • 41 citations

Application of Preferential Electrochemical Etching of Silicon to Semiconductor Device Technology

1970 • 40 citations

Preparation of Thin Silicon Crystals by Electrochemical Thinning of Epitaxially Grown Structures

1970 • 40 citations

Thermomigration of aluminum-rich liquid wires through silicon

1976 • 38 citations

Ink Jet Technology

1977 • 38 citations

Sensor development in the microcomputer age

1979 • 37 citations

Flip-chip approach to endfire coupling between single-mode optical fibres and channel waveguides

1976 • 37 citations

ChemInform Abstract: CHEMICAL ETCHING OF SILICON. IV. ETCHING TECHNOLOGY

1977 • 35 citations

Low Energy Metal-Glass Bonding

1969 • 35 citations

Electrochemically Thinned N/N+ Epitaxial Silicon—Method and Applications

1971 • 35 citations

Optical Waveguides Fabricated by Preferential Etching

1975 • 34 citations

Photosensitive field emission from silicon point arrays

1972 • 34 citations

Josephson tunneling through locally thinned silicon wafers

1974 • 34 citations

Vertical channel field-controlled thyristors with high gain and fast switching speeds

1978 • 34 citations

High transmission X-ray masks for lithographic applications

1977 • 33 citations

Gate-controlled diodes for ionic concentration measurement

1979 • 33 citations

Silicon charge electrode array for ink jet printing

1978 • 33 citations

Electromechanical devices utilizing thin Si diaphragms

1977 • 32 citations

Chemical etching of silicon, germanium, gallium arsenide, and gallium phosphide

1978 • 32 citations

Microprocessors get integrated sensors: Sensing devices and signal processing built into one silicon chip portend a new class of ‘smart’ sensors

1980 • 31 citations

Schottky diodes and other devices on thin silicon membranes

1976 • 31 citations

Nonplanar power field-effect transistors

1978 • 30 citations

Vapor-Phase Deposition of Beta-Silicon Carbide on Silicon Substrates

1973 • 30 citations

UMOS transistors on

1980 • 29 citations

Epitaxial Deposition of Silicon in Deep Grooves

1975 • 29 citations

A Microminiature Solid-State Capacitive Blood Pressure Transducer with Improved Sensitivity

1973 • 29 citations

Improved performance of GaAs microwave field-effect transistors with low inductance via-connections through the substrate

1978 • 28 citations

A Low-Stress Insulating Film on Silicon by Chemical Vapor Deposition

1968 • 28 citations

Preparation of thin windows in silicon masks for x-ray lithography

1975 • 27 citations

Optimization of nonplanar power MOS transistors

1978 • 26 citations

Miniature Cantilever Beams Fabricated by Anisotropic Etching of Silicon

1980 • 26 citations

Single-mode coupling between fibers and indiffused waveguides

1977 • 26 citations

Random walk of liquid droplets migrating in silicon

1976 • 25 citations

Epitaxial V-groove bipolar integrated circuit process

1973 • 25 citations

High-speed low-power x-ray lithography

1974 • 25 citations

Detection of Discontinuities in Passivating Layers on Silicon by NaOH Anisotropic Etch

1972 • 23 citations

GaAs laser array source package

1977 • 23 citations

Buckling of thermally-grown SiO₂thin films

1972 • 21 citations

Optical coupling from fibers to channel waveguides formed on silicon

1978 • 21 citations

Microtool fabrication by etch pit replication

1973 • 21 citations

Chemical vapor deposition applications in microelectronics processing

1981 • 20 citations

Thin-film dye laser with etched cavity

1976 • 20 citations

Rotating MNOS disk memory device

1981 • 20 citations

Migration on fine molten wires in thin silicon wafers

1978 • 18 citations

On the thermomigration of liquid wires

1978 • 18 citations

Single-crystal silicon-barrier Josephson junctions

1975 • 18 citations

Stresses generated by the thermomigration of liquid inclusions in silicon

1978 • 17 citations

Optical bends and rings fabricated by preferential etching

1975 • 17 citations

A backside illuminated 400 × 400 charge-coupled device imager

1976 • 15 citations

A thin-film prism as a beam separator for multimode guided waves in integrated optics

1975 • 15 citations

An aluminum/SiO2/silicon−on−sapphire light valve matrix for projection displays

1975 • 14 citations

A Coherent Optical Computer System Using the Membrane Light Modulator

1970 • 14 citations

A new C-MOS technology using anisotropic etching of silicon

1975 • 14 citations

Solid-state processes to produce hemispherical components for inertial fusion targets

1981 • 13 citations

Fabrication of hemispherical structures using semiconductor technology for use in thermonuclear fusion research

1979 • 13 citations

Behavior of Large-Scale Surface Perturbations during Silicon Epitaxial Growth

1967 • 12 citations

High density multichannel optical waveguides with integrated couplers

1975 • 12 citations

A monolithic thermopile detector fabricated using integrated-circuit technology

1980 • 12 citations

Characterization of Vapor‐Deposited Paraxylylene Coatings

1977 • 12 citations

Thin-film beam splitter and reflector for optical guided waves

1975 • 11 citations

Insulating Materials for Semiconductor Surfaces

1970 • 11 citations

Application of silicon crystal orientation and anisotropic effects to the control of charge spreading in devices

1974 • 11 citations

Silicon nitride tribological applications of a ceramic material

1970 • 11 citations

WP-B6 silicon cantilever beam accelerometer utilizing a PI-FET capacitive transducer

1979 • 10 citations

Preferential Electrochemical Etching of P+ Silicon in an Aqueous HF-H[sub 2]SO[sub 4] Electrolyte

1972 • 9 citations

Thin Epitaxial Silicon for De/Dx Detectors

1977 • 8 citations

Joining and recrystallization of Si using the thermomigration process

1980 • 8 citations

An Investigation of the Application of Porous Silicon Layers to the Dielectric Isolation of Integrated Circuits

1979 • 7 citations

A planar-processed PI-FET accelerometer

1980 • 7 citations

Grinding damage of silicon nitride determined by abrasive wear tests

1976 • 6 citations

Lamellar devices processed by thermomigration

1977 • 6 citations

Fatigue Strength of Crystalline Solids

1961 • 5 citations

Single mode optical fiber pickoff coupler

1976 • 5 citations

A novel buried grid device fabrication technology

1980 • 4 citations

Physics of thin films. Volume 13

1987 • 4 citations

Laser applications (volume 2)

1974 • 3 citations

Air-gap-isolated microcircuits (beam-lead devices)

1968 • 2 citations

WP-A1 monolithic polycrystalline silicon distributed RC devices

1978 • 2 citations

Air-gap isolated microcircuits—Beam-lead devices

1968 • 1 citations