On etching very narrow grooves in silicon

DOI: 10.1063/1.88113

Applied Physics Letters

Data up to Jan 2025

Published1975

Citations132

References4

Fields

Materials science Engineering Optoelectronics Metallurgy Composite material

Total Citations Per Year

Abstract

References (4)

Growth and Perfection of Crystals.

1959 • 1,404 citations

Anisotropic Etching of Silicon

1969 • 310 citations

A Water-Amine-Complexing Agent System for Etching Silicon

1967 • 307 citations

Dissolution Kinetics at Dislocation Etch Pits in Single Crystals of Lithium Fluoride

1960 • 66 citations

Cited By (0)

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On etching very narrow grooves in silicon (1975) – Applied Physics Letters | Metascience Observatory Explorer