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Miniature Cantilever Beams Fabricated by Anisotropic Etching of Silicon

R.D. Jolly, R.S. Muller
DOI: 10.1149/1.2129585
Journal of The Electrochemical Society

Data up to Jan 2025

Published1980
Citations26
References0
Fields
Materials sciencePhysicsOptoelectronicsComposite materialNanotechnology

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Miniature Cantilever Beams Fabricated by Anisotropic Etching of Silicon (1980) – Journal of The Electrochemical Society | Metascience Observatory Explorer