Epitaxial Deposition of Silicon in Deep Grooves

DOI: 10.1149/1.2134106

Journal of The Electrochemical Society

Data up to Jan 2025

Published1975

Citations29

References0

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Materials science Chemistry Geology Computer science Engineering Optoelectronics Nanotechnology Mineralogy

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Epitaxial Deposition of Silicon in Deep Grooves (1975) – Journal of The Electrochemical Society | Metascience Observatory Explorer