A batch-fabricated silicon accelerometer

L. M. Roylance, James B. Angell

DOI: 10.1109/t-ed.1979.19795

IEEE Transactions on Electron Devices

Data up to Jan 2025

Published1979

Citations500

References4

Fields

Materials science Computer science Engineering Physics Medicine Electronic engineering Optoelectronics Acoustics

Total Citations Per Year

Abstract

References (4)

Theory of elasticity of an anisotropic elastic body

1964 • 1,456 citations

Theory of Vibration with Applications

2018 • 940 citations

Field Assisted Glass-Metal Sealing

1969 • 728 citations

Elements of strength of materials

1940 • 126 citations

Cited By (0)

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A batch-fabricated silicon accelerometer (1979) – IEEE Transactions on Electron Devices | Metascience Observatory Explorer