Interface effects in the formation of silicon oxide on metal silicide layers over silicon substrates

General Relationship for the Thermal Oxidation of Silicon

1965 • 3,245 citations

Physics and technology of semiconductor devices

1967 • 2,850 citations

1 µm MOSFET VLSI technology: Part VII—Metal silicide interconnection technology—A future perspective

1979 • 167 citations

Diffusion in intermetallic compounds with the CaF2 structure: A marker study of the formation of NiSi2 thin films

1982 • 126 citations

Formation of iridium silicides from Ir thin films on Si substrates

1979 • 124 citations

Oxidation mechanisms in WSi2 thin films

1978 • 119 citations

Reaction kinetics of tungsten thin films on silicon (100) surfaces

1973 • 92 citations

Reaction kinetics of molybdenum thin films on silicon (111) surface

1978 • 85 citations

Oxidation of silicide thin films: TiSi2

1983 • 76 citations

The formation of silicides in Mo-W Bilayer films on si substrates: A marker experiment

1979 • 75 citations

Kinetics of the thermal oxidation of WSi2

1979 • 68 citations

Properties of tungsten silicide film on polycrystalline silicon

1981 • 67 citations

An alternative marker experiment in the formation of Mo and W silicides

1978 • 62 citations

Silicon Oxidation Studies: The Oxidation of Heavily B‐ and P‐Doped Single Crystal Silicon

1978 • 62 citations

An interface — marker technique applied to the study of metal silicide growth

1980 • 61 citations

Oxidation of tantalum disilicide on polycrystalline silicon

1980 • 57 citations

A Xe marker study of the transformation of Ni2Si to NiSi in thin films

1981 • 57 citations

The thin-film formation of rhodium silicides

1980 • 56 citations

Characterization of Thin Film Molybdenum Silicide Oxide

1980 • 54 citations

Thermal oxidation of hafnium silicide films on silicon

1980 • 54 citations

Thermal oxidation of nickel disilicide

1982 • 48 citations

Oxidation mechanisms in TiSi2 films on single silicon substrates

1980 • 46 citations

IrSi1.75 a new semiconductor compound

1982 • 43 citations

Radioactive Ni∗ tracer study of the nickel silicide growth mechanism

1982 • 43 citations

Studies of the Growth and Oxidation of Metal‐Silicides Using Radioactive 31Si as Tracer

1981 • 37 citations

Oxidation of sputtered molybdenum silicide thin films

1978 • 32 citations

Investigation on TiSi2 thin-film oxidation by radioactive tracer technique

1982 • 30 citations

Studies of steam-oxidized WSi2 by Auger sputter profiling

1980 • 14 citations

Investigation of the oxidation properties of cw laser formed WSi2

1982 • 14 citations