Kinetics of the thermal oxidation of WSi2

General Relationship for the Thermal Oxidation of Silicon

1965 • 3,245 citations

High-Temperature Oxidation

1965 • 366 citations

Oxidation mechanisms in WSi2 thin films

1978 • 119 citations

High‐Temperature Oxidation of Molybdenum Disilicide

1966 • 119 citations

A New MOS Process Using MoSi₂as a Gate Material

1978 • 65 citations

High‐Temperature Behavior of MoSi₂ and Mo₅Si₃

1964 • 32 citations

Oxidation of sputtered molybdenum silicide thin films

1978 • 32 citations