Two-dimensional thermal oxidation of silicon. II. Modeling stress effects in wet oxides

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1979 • 360 citations

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1979 • 274 citations

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1982 • 254 citations

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1976 • 134 citations

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1983 • 128 citations

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1983 • 105 citations

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1983 • 74 citations

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1980 • 57 citations

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1967 • 52 citations

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1983 • 43 citations

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1982 • 43 citations

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1987 • 39 citations

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1985 • 35 citations

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1985 • 33 citations

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1987 • 27 citations

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1938 • 23 citations

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1982 • 22 citations

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1978 • 22 citations

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1986 • 19 citations

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1983 • 19 citations

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1984 • 11 citations