The Oxidation of Shaped Silicon Surfaces

R. B. Marcus, T. T. Sheng

DOI: 10.1149/1.2124118

Journal of The Electrochemical Society

Data up to Jan 2025

Published1982

Citations254

References1

Fields

Materials science Chemistry Engineering Philosophy Biology Chemical engineering Composite material Nanotechnology

Total Citations Per Year

Abstract

References (1)

Physics and technology of semiconductor devices

1967 • 2,850 citations

Cited By (0)

Loading...