Two-dimensional oxidation

General Relationship for the Thermal Oxidation of Silicon

1965 • 3,245 citations

A Numerical Method for Solving Incompressible Viscous Flow Problems

1997 • 2,404 citations

The Oxidation of Shaped Silicon Surfaces

1982 • 254 citations

Topology of Silicon Structures with Recessed SiO2

1976 • 87 citations

Simulation of doping processes

1980 • 85 citations

A bird's beak free local oxidation technology feasible for VLSI circuits fabrication

1982 • 84 citations

Process design using two-dimensional process and device simulators

1982 • 45 citations

Selective oxidation technologies for high density MOS

1981 • 28 citations

Numerical Simulation of Gate Oxide Thinning in MOS Devices

1982 • 22 citations

A simplified two-dimensional numerical analysis of MOS devices—DC case

1980 • 6 citations