Fabrication of silicon nanostructures with a scanning tunneling microscope

Positioning single atoms with a scanning tunnelling microscope

1990 • 3,051 citations

Ideal hydrogen termination of the Si (111) surface

1990 • 1,377 citations

Modification of hydrogen-passivated silicon by a scanning tunneling microscope operating in air

1990 • 725 citations

Atomic-scale conversion of clean Si(111):H-1×1 to Si(111)-2×1 by electron-stimulated desorption

1990 • 352 citations

Unpinned GaAs MOS capacitors and transistors

1988 • 155 citations

Ellipsometric Study of Orientation‐Dependent Etching of Silicon in Aqueous KOH

1985 • 119 citations

The scanning tunneling microscope as a tool for nanofabrication

1990 • 103 citations

Nanolithography on semiconductor surfaces under an etching solution

1990 • 93 citations

Pattern generation on semiconductor surfaces by a scanning tunneling microscope operating in air

1991 • 75 citations

Hydrocarbon reaction with HF-cleaned Si(100) and effects on metal-oxide-semiconductor device quality

1991 • 74 citations

GaAs MIS structures with SiO2 using a thin silicon interlayer

1988 • 66 citations

Fabrication of nanometer structures using STM

1992 • 54 citations

Large temperature changes induced by molecular beam epitaxial growth on radiatively heated substrates

1992 • 52 citations

Unpinned GaAs Schottky barriers with an epitaxial silicon layer

1991 • 40 citations

Integration of scanning tunneling microscope nanolithography and electronics device processing

1992 • 33 citations