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Integration of scanning tunneling microscope nanolithography and electronics device processing

John A. Dagata, W. F. Tseng, J. Bennett, E. A. Dobisz, J. Schneir
DOI: 10.1116/1.577990
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Data up to Jan 2025

Published1992
Citations33
References0
Fields
Materials scienceMedicineNanotechnologyOptoelectronicsPathology

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