Single-Step Optical Lift-Off Process

Characterization of positive photoresist

1975 • 405 citations

Modeling projection printing of positive photoresists

1975 • 234 citations

Fabrication Process for Josephson Integrated Circuits

1980 • 203 citations

Electron Resists for Microcircuit and Mask Production

1969 • 194 citations

PMMA copolymers as high sensitivity electron resists

1979 • 58 citations

Thermal Effects on the Photoresist AZ1350J

1977 • 35 citations

Electron-Beam Fabrication of Ion Implanted High-Performance FET Circuits

1973 • 34 citations

Computer-controlled resist exposure in the scanning electron microscope

1972 • 33 citations

Thermal Analysis of Positive Photoresist Films by Mass Spectrometry

1977 • 27 citations

Recent developments in electron-resist evaluation techniques

1975 • 27 citations

Electron-Beam Resists for Lift-Off Processing with Potential Application to Josephson Integrated Circuits

1980 • 6 citations