Thermal Effects on the Photoresist AZ1350J

Characterization of positive photoresist

1975 • 405 citations

Modeling projection printing of positive photoresists

1975 • 234 citations

Polymer Resist Systems for Photo- And Electron Lithography

1976 • 75 citations

Reduction of photoresist standing-wave effects by post-exposure bake

1975 • 61 citations

Optical lithography

1975 • 59 citations

In-situ measurement of dielectric thickness during etching or developing processes

1975 • 57 citations

Thermal Analysis of Positive Photoresist Films by Mass Spectrometry

1977 • 27 citations

Projection printed photolithographic images in positive photoresists

1975 • 9 citations