The sputtering of oxides part i: a survey of the experimental results

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

1969 • 3,398 citations

スパッタの理論 I 非晶質のスパッタ収量と多結晶ターゲット

1969 • 1,970 citations

Sputtering Yields for Low Energy He+-, Kr+-, and Xe+-Ion Bombardment

1962 • 422 citations

Collection and sputtering experiments with noble gas ions

1961 • 412 citations

Growth of Crystals

2012 • 400 citations

Sputtering Experiments with 1- to 5-keV Ar+ Ions

1963 • 234 citations

An investigation of thermal spikes by studying the high energy sputtering of metals at elevated temperatures

1965 • 165 citations

ION-BOMBARDMENT-INDUCED RADIATION DAMAGE IN SOME CERAMICS AND IONIC CRYSTALS: DETERMINED BY ELECTRON DIFFRACTION AND GAS RELEASE MEASUREMENTS

1966 • 148 citations

Evidence for heated spikes in bombarded gold from the energy spectrum of atoms ejected by 43 kev a⁺and xe⁺ions

1962 • 138 citations

Formation of SiO₂ Films by Oxygen-Ion Bombardment

1966 • 102 citations

Surface Cleaning by Cathode Sputtering

1960 • 79 citations

Sputtering rates under solar-wind bombardment

1963 • 74 citations

On the increase in the electrical conductivity of MoO3 and V2O5 following ion bombardment. Studies on bombardment-enhanced conductivity-I

1972 • 70 citations

Modification of the lunar surface by the solar-wind bombardment

1963 • 62 citations

RANGES OF Na, K, Kr, AND Xe IONS IN AMORPHOUS Al₂O₃ IN THE ENERGY REGION 40–1 000 KEV

1967 • 59 citations

Effect of Oxygen on the rf-Sputtering Rate of SiO2

1968 • 58 citations

Effect of Elevated Temperatures on Sputtering Yields

1965 • 57 citations

Sputtering Studies of Insulators by Means of Langmuir Probes

1965 • 57 citations

Sputtering Experiments with 1- to 5-keV Ar+ Ions. II. Monocrystalline Targets of Al, Cu, and Au

1967 • 56 citations

Mercury Ion Beam Sputtering of Metals at Energies 4–15 kev

1961 • 51 citations

A spectroscopic investigation of the reactive sputtering of aluminium

1971 • 50 citations

High-Temperature Vaporization and Thermodynamics of the Titanium Oxides. I. Vaporization Characteristics of the Crystalline Phases

1967 • 48 citations

III. Energy spectra for copper

1968 • 44 citations

Determination of bond energy of silica glass by means of ion sputtering investigations

1970 • 41 citations

Cesium-Ion Bombardment of Aluminum Oxide in a Controlled Oxygen Environment

1967 • 36 citations

Sputtering of Niobium by Niobium, Hydrogen, Deuterium, and Helium Ions in the 10- to 80-keV Energy Range

1971 • 34 citations

Procedure for Stripping Anodic Oxide Films from Tantalum and Niobium

1964 • 34 citations

Equivalent dc Sputtering Yields of Insulators

1967 • 34 citations

Sputtering of Vitreous Silica by 20- to 60-kev Xe+ Ions

1961 • 31 citations

Sputtering and depth-distribution phenomena in KCl, Al₂O₃, and TiO₂

1968 • 31 citations

Grundschaltungen von flüssigen Automaten und Relaxationssystemen / Basic Circuits of Fluid Automata and Relaxation Systems

1972 • 28 citations

Phénomènes de pulvérisation et de distribution en profondeur. Partie IV. Pulvérisation cathodique des oxydes Nb₂O₅, Ta₂O₅ et WO₃

1970 • 26 citations

A Study of the Formation of Anodic Oxide Films on Titanium

1961 • 26 citations

A Radiochemical Technique for Determining Depth Distributions in Mo

1972 • 23 citations

Cesium Ion Sputtering of Aluminum

1966 • 21 citations

Low-Energy-Ion-Bombardment Damage in Germanium

1966 • 20 citations

Isolating surface layers on metallic conductors produced by ion bombardment

1969 • 16 citations

Dissolution of the oxide film on zirconium

1957 • 15 citations

On the Anodic Sectioning of Vanadium

1973 • 13 citations

Resistive layers formed by ion implantation into metal films

1970 • 12 citations

Bombardment of Various Elements by Hg⁺and A⁺Ions

1956 • 9 citations

Simple Technique for Examination of Sputtering Patterns

1964 • 7 citations

Analysis of the Formation Current in Electrolytic Oxidation of Zirconium

1954 • 6 citations

Cesium ion sputtering of aluminum, copper, and titanium.

1967 • 4 citations

The observation of collision sequences in UO2

1963 • 3 citations

The Structure of Oxide Films Obtained by Oxygen Ion Bombardment of a Silicon Surface

1967 • 3 citations