A spectroscopic investigation of the reactive sputtering of aluminium

Molecular Spectra and Molecular Structure

1979 • 15,902 citations

Physics of Thin Films

1964 • 1,769 citations

The mechanism of reactive sputtering

1968 • 94 citations

Getter Sputtering for the Preparation of Thin Films of Superconducting Elements and Compounds

1964 • 79 citations

Investigation of the Sputtering of Aluminum Using Atomic-Absorption Spectroscopy

1970 • 51 citations

Special Cases of Predissociation

1945 • 31 citations