Electron spectroscopy study of silicon surfaces exposed to XeF2 and the chemisorption of SiF4 on silicon

Hartree-Slater subshell photoionization cross-sections at 1254 and 1487 eV

1976 • 5,626 citations

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

1969 • 3,398 citations

スパッタの理論 I 非晶質のスパッタ収量と多結晶ターゲット

1969 • 1,970 citations

Attenuation lengths of low-energy electrons in solids

1974 • 720 citations

Ion- and electron-assisted gas-surface chemistry—An important effect in plasma etching

1979 • 696 citations

A mechanism of surface micro-roughening by ion bombardment

1973 • 547 citations

Quantitative Auger electron spectroscopy and electron ranges

1972 • 400 citations

The etching of silicon with XeF2 vapor

1979 • 294 citations

Properties of oxidized silicon as determined by angular-dependent X-ray photoelectron spectroscopy

1976 • 272 citations

An Auger analysis of the SiO2-Si interface

1976 • 261 citations

Electron mean escape depths from x−ray photoelectron spectra of thermally oxidized silicon dioxide films on silicon

1975 • 259 citations

Ion-surface interactions in plasma etching

1977 • 215 citations

Electron escape depth in silicon

1974 • 155 citations

Plasma etching in integrated circuit manufacture—A review

1977 • 120 citations

An ESCA study of organosilicon compounds

1976 • 102 citations

Dry process technology (reactive ion etching)

1976 • 97 citations

Introduction to ion and plasma etching

1976 • 83 citations

Electron distribution in the xenon fluorides and xenon oxide tetrafluoride by ESCA and evidence for orbital independence in the xenon-fluorine bonding

1974 • 56 citations

A New Chemical Dry Etching

1976 • 53 citations

The use of X-ray photoelectron spectroscopy to assess d orbital participation in compounds of silicon and germanium

1972 • 43 citations

An XPS and Auger investigation of CF+3 ion bombardment of silicon

1979 • 39 citations

Infrared Chemiluminescence from Xe<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:msub><mml:mrow><mml:mi mathvariant="normal">F</mml:mi></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math>-Silicon-Surface Reactions

1979 • 22 citations