Ion Beam Assisted Deposition of Metal Organic Films Using Focused Ion Beams

Ion- and electron-assisted gas-surface chemistry—An important effect in plasma etching

1979 • 696 citations

Ion-beam-induced conductivity in polymer films

1983 • 122 citations

A novel anisotropic dry etching technique

1981 • 117 citations

Ion Beam Exposure of Resist Materials

1979 • 77 citations

Carbon buildup by ion-induced polymerization under 100–400 keV H, He and Li bombardment

1981 • 32 citations

Chemical effects induced by ion implantation in molecular solids

1983 • 11 citations