A bird's beak free local oxidation technology feasible for VLSI circuits fabrication

Formation of Silicon Nitride at a Si ‐ SiO2 Interface during Local Oxidation of Silicon and during Heat‐Treatment of Oxidized Silicon in NH 3 Gas

1976 • 134 citations

Local Oxidation of Silicon and its Application in Semiconductor-Device Technology

1970 • 130 citations

Topology of Silicon Structures with Recessed SiO2

1976 • 87 citations

Selective anodic oxidation of silicon in oxygen plasma

1980 • 39 citations

Bird's Beak Configuration and Elimination of Gate Oxide Thinning Produced during Selective Oxidation

1980 • 32 citations

A Method for Area Saving Planar Isolation Oxides Using Oxidation Protected Sidewalls

1980 • 22 citations

Methods to Improve the Surface Planarity of Locally Oxidized Silicon Devices

1977 • 12 citations