A direct comparison between sem (ebic) and hvem images of crystal defects in semiconductors

Oxidation-induced stacking faults in silicon. II. Electrical effects in P N diodes

1974 • 87 citations

Observations of Individual Dislocations and Oxygen Precipitates in Silicon with a Scanning Electron Beam Method

1965 • 70 citations

MICROSCOPY OF INTERNAL CRYSTAL IMPERFECTIONS IN Si p-n JUNCTION DIODES BY USE OF ELECTRON BEAMS

1963 • 58 citations

Simultaneous Observation of Diffusion-Induced Dislocation Slip Patterns in Si With Electron Beam Scanning and Optical Means

1964 • 33 citations

The direct observation of electrical leakage paths due to crystal defects by use of the scanning electron microscope

1966 • 23 citations

Observation of dislocations in a silicon phototransistor by scanning electron microscopy using the barrier electron voltaic effect

1976 • 22 citations

Scanning electron microscopy in device diagnostics and reliability physics

1969 • 21 citations

Detection of Partial Dislocations in Silicon with the Scanning Electron Beam Technique

1966 • 11 citations