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The direct observation of electrical leakage paths due to crystal defects by use of the scanning electron microscope
Data up to Jan 2025
Published1966
Citations23
References3
Total Citations Per Year
Abstract
References (3)
Evaluation of Passivated Integrated Circuits Using the Scanning Electron Microscope
1964 • 89 citations
Observations of Individual Dislocations and Oxygen Precipitates in Silicon with a Scanning Electron Beam Method
1965 • 70 citations
Influence of mechanical damage on avalanche breakdown in silicon pn junctions
1964 • 7 citations
Cited By (0)
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