Scanning electron microscopy in device diagnostics and reliability physics

Stroboscopic scanning electron microscopy

1968 • 113 citations

THE EFFECT OF LOW-ENERGY ELECTRON IRRADIATION OF METAL-OXIDE-SEMICONDUCTOR STRUCTURES

1965 • 81 citations

Electron beam induced potential contrast on unbiased planar transistors

1967 • 61 citations

Voltage measurement in the scanning electron microscope

1968 • 44 citations

REVERSIBLE CHANGES IN TRANSISTOR CHARACTERISTICS CAUSED BY SCANNING ELECTRON MICROSCOPE EXAMINATION

1965 • 29 citations

An application of beta conductivity to measurement of resistivity distribution

1968 • 19 citations

The display of information from scanned measuring systems by contour mapping

1969 • 18 citations

Failure analysis of microcircuitry by scanning electron microscopy

1967 • 9 citations

Device failure analysis by scanning electron microscopy

1969 • 7 citations

Scanning technique with slow electrons for investigation of integrated circuits

1967 • 5 citations

A low energy scanned electron beam potential probe

1968 • 4 citations

A method of examination of semiconductor oxides with a scanning electron microscope

1966 • 3 citations