Dissociation energetics of SiF systems of relevance to etching reactions
Data up to Jan 2025
Total Citations Per Year
Abstract
References (25)
Ab initio effective core potentials for molecular calculations. Potentials for the transition metal atoms Sc to Hg
1985 • 12,937 citations
Gaussian Basis Functions for Use in Molecular Calculations. I. Contraction of (9s5p) Atomic Basis Sets for the First-Row Atoms
1970 • 4,990 citations
Gaussian-Type Functions for Polyatomic Systems. I
1965 • 4,930 citations
A complete active space SCF method (CASSCF) using a density matrix formulated super-CI approach
1980 • 3,584 citations
Binding energies in atomic negative ions
1975 • 1,526 citations
Self-Consistent Procedures for Generalized Valence Bond Wavefunctions. Applications H3, BH, H2O, C2H6, and O2
1972 • 376 citations
Relation between singlet-triplet gaps and bond energies
1986 • 298 citations
The Description of Chemical Bonding From AB Initio Calculations
1978 • 252 citations
Synchrotron photoemission investigation of the initial stages of fluorine attack on Si surfaces: Relative abundance of fluorosilyl species
1984 • 203 citations
Ab initiocluster study of the interaction of fluorine and chlorine with the Si(111) surface
1983 • 184 citations
Plasma-assisted etching mechanisms: The implications of reaction probability and halogen coverage
1985 • 109 citations
Orbital optimization in electronic wave functions; equations for quadratic and cubic convergence of general multiconfiguration wave functions
1976 • 95 citations
Detection of the Silyl Radical Si<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:msub><mml:mrow><mml:mi mathvariant="normal">H</mml:mi></mml:mrow><mml:mrow><mml:mn>3</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math>by Infrared Diode-Laser Spectroscopy
1986 • 95 citations
X̃ 1A1, ã 3B1, and à 1B1 electronic state of silylenes. Structures and vibrational frequencies of SiH2, and SiHF, and SiF2
1983 • 91 citations
Bonding in transition-metal-methylene complexes. 2. (RuCH2)+, a complex exhibiting low-lying methylidene-like and carbene-like states
1986 • 77 citations
Molecular Orbital Investigation of CF and SiF and Their Positive and Negative Ions
1971 • 74 citations
The shape and Hamiltonian consistent (SHC) effective potentials
1981 • 67 citations
A b i n i t i o study of the vibrational dependence of hyperfine coupling constants in the methyl, silyl, and formaldehyde anion radicals
1980 • 64 citations
The chromium methylidene cation: CrCH2+
1984 • 58 citations
A b i n i t i o theoretical results on the stability of cyclic ozone
1977 • 43 citations
Properties of the monofluorides of nitrogen, silicon, phosphorus, and sulfur from a molecular orbital study
1973 • 43 citations
Theoretical studies on low-lying valence states of NS, SiF, and CCl
1976 • 33 citations
An SCF–CI study of the structures, inversion barriers, and inversion frequencies of SiH3, PH3+, and SH3++
1981 • 31 citations
The electronic spectrum of silicon difluorid. A theoretical study
1973 • 28 citations
An ab initio calculation of the potential surface and rotation—vibration energies of the silyl radical
1984 • 25 citations