Back to search

Dissociation energetics of SiF systems of relevance to etching reactions

Data up to Jan 2025

Published1987
Citations30
References25

Total Citations Per Year

Abstract

References (25)

Ab initio effective core potentials for molecular calculations. Potentials for the transition metal atoms Sc to Hg

1985 • 12,937 citations

Gaussian Basis Functions for Use in Molecular Calculations. I. Contraction of (9s5p) Atomic Basis Sets for the First-Row Atoms

1970 • 4,990 citations

Gaussian-Type Functions for Polyatomic Systems. I

1965 • 4,930 citations

A complete active space SCF method (CASSCF) using a density matrix formulated super-CI approach

1980 • 3,584 citations

Binding energies in atomic negative ions

1975 • 1,526 citations

Self-Consistent Procedures for Generalized Valence Bond Wavefunctions. Applications H3, BH, H2O, C2H6, and O2

1972 • 376 citations

Relation between singlet-triplet gaps and bond energies

1986 • 298 citations

The Description of Chemical Bonding From AB Initio Calculations

1978 • 252 citations

Synchrotron photoemission investigation of the initial stages of fluorine attack on Si surfaces: Relative abundance of fluorosilyl species

1984 • 203 citations

Ab initiocluster study of the interaction of fluorine and chlorine with the Si(111) surface

1983 • 184 citations

Plasma-assisted etching mechanisms: The implications of reaction probability and halogen coverage

1985 • 109 citations

Orbital optimization in electronic wave functions; equations for quadratic and cubic convergence of general multiconfiguration wave functions

1976 • 95 citations

Detection of the Silyl Radical Si<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:msub><mml:mrow><mml:mi mathvariant="normal">H</mml:mi></mml:mrow><mml:mrow><mml:mn>3</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math>by Infrared Diode-Laser Spectroscopy

1986 • 95 citations

X̃ 1A1, ã 3B1, and à 1B1 electronic state of silylenes. Structures and vibrational frequencies of SiH2, and SiHF, and SiF2

1983 • 91 citations

Bonding in transition-metal-methylene complexes. 2. (RuCH2)+, a complex exhibiting low-lying methylidene-like and carbene-like states

1986 • 77 citations

Molecular Orbital Investigation of CF and SiF and Their Positive and Negative Ions

1971 • 74 citations

The shape and Hamiltonian consistent (SHC) effective potentials

1981 • 67 citations

A b i n i t i o study of the vibrational dependence of hyperfine coupling constants in the methyl, silyl, and formaldehyde anion radicals

1980 • 64 citations

The chromium methylidene cation: CrCH2+

1984 • 58 citations

A b i n i t i o theoretical results on the stability of cyclic ozone

1977 • 43 citations

Properties of the monofluorides of nitrogen, silicon, phosphorus, and sulfur from a molecular orbital study

1973 • 43 citations

Theoretical studies on low-lying valence states of NS, SiF, and CCl

1976 • 33 citations

An SCF–CI study of the structures, inversion barriers, and inversion frequencies of SiH3, PH3+, and SH3++

1981 • 31 citations

The electronic spectrum of silicon difluorid. A theoretical study

1973 • 28 citations

An ab initio calculation of the potential surface and rotation—vibration energies of the silyl radical

1984 • 25 citations

Cited By (0)

Loading...
Dissociation energetics of SiF systems of relevance to etching reactions (1987) – The Journal of Chemical Physics | Metascience Observatory Explorer