Metal wire definition by high resolution imprint and lift-off

Sub-10 nm imprint lithography and applications

1997 • 1,094 citations

Mold-assisted nanolithography: A process for reliable pattern replication

1996 • 639 citations

Nanoscale silicon field effect transistors fabricated using imprint lithography

1997 • 140 citations

Nanometer-scale field-induced oxidation of Si(111):H by a conducting-probe scanning force microscope: Doping dependence and kinetics

1995 • 117 citations