Plasma etching—A discussion of mechanisms

J. W. Coburn, Harold F. Winters

DOI: 10.1116/1.569958

Journal of Vacuum Science and Technology

Data up to Jan 2025

Published1979

Citations559

References0

Fields

Materials science Chemistry Physics Nanotechnology Physical chemistry Nuclear physics

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Plasma etching—A discussion of mechanisms (1979) – Journal of Vacuum Science and Technology | Metascience Observatory Explorer