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Discontinued Journal

This journal is no longer active in Scopus.

Indexed in Scopus: 1968-1982; 1966

Journal of Vacuum Science and Technology

American Institute of Physics · Not Open Access

scitation.aip.org

Data up to Jan 2025

Total Papers5,557
Total Citations118,206
Years Active1964–2020
ISSN0022-5355, 2331-1754
Primary Fields
Materials scienceNanotechnology
Impact Metrics
2-Year IF (2020)0.30
5-Year IF (2020)0.08
CiteScore (2020)0.09

Metrics computed from OpenAlex data unless marked (official).

Title History
Continued as:
  • Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
  • Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

Impact Metrics Over Time

Publications Over Time

Total Citations by Publication Year

Field Distribution

Broad Fields

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