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Glow Discharge Optical Spectroscopy for Monitoring Sputter Deposited Film Thickness

J. E. Greene, F. Sequeda‐Osorio
DOI: 10.1116/1.1318510
Journal of Vacuum Science and Technology

Data up to Jan 2025

Published1973
Citations45
References0
Fields
Materials scienceChemistryBiologyPhysicsOptoelectronicsOpticsNanotechnology

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