Interactions between sequential dopant diffusions in silicon-a review

Radiation effects in semiconductors

1971 • 817 citations

Generation and Distribution of Dislocations by Solute Diffusion

1961 • 561 citations

Diffusion Mechanisms and Point Defects in Silicon and Germanium

1968 • 467 citations

Radiation Damage and Defects in Semiconductors

1973 • 379 citations

Diffusion of Donor and Acceptor Elements in Silicon

1956 • 336 citations

Redistribution of Acceptor and Donor Impurities during Thermal Oxidation of Silicon

1964 • 330 citations

Detailed analysis of thin phosphorus-diffused layers in p-type silicon

1961 • 210 citations

Effect of complex formation on diffusion of arsenic in silicon

1973 • 156 citations

Interactions in Sequential Diffusion Processes in Semiconductors

1968 • 133 citations

Oxidation, defects and vacancy diffusion in silicon

1969 • 130 citations

Self‐ and impurity diffusion in Ge and Si

1975 • 114 citations

Gold-Induced Climb of Dislocations in Silicon

1960 • 106 citations

Shallow phosphorus diffusion profiles in silicon

1969 • 86 citations

Arsenic Isoconcentration Diffusion Studies in Silicon

1969 • 86 citations

Phosphorus Isoconcentration Diffusion Studies in Silicon

1973 • 75 citations

Studies of anomalous diffusion of impurities in silicon

1966 • 70 citations

Intrinsic Diffusion of Boron and Phosphorus in Silicon Free From Surface Effects

1971 • 66 citations

The Diffusion of Phosphorus in Silicon

1962 • 61 citations

Diffusion of charged particles into a semiconductor under consideration of the built-in field

1961 • 58 citations

Effects of High Phosphorus Concentration on Diffusion into Silicon

1968 • 56 citations

The Cooperative Diffusion Effect

1966 • 53 citations

On the nature of the kink in the carrier profile for phosphorus-diffused layers in silicon

1972 • 50 citations

Diffusion of Phosphorus into Silicon

1962 • 50 citations

Non-metallic solids. Vacancy enhanced diffusion in silicon. Effects of irradiation and of chemical impurities

1961 • 48 citations

Concentration-Dependent Diffusion of Boron and Phosphorus in Silicon

1970 • 44 citations

Anomalous diffusion in semiconductorsȁa quantitative analysis

1970 • 42 citations

Distribution of Dislocations near the Junction Formed by Diffusion of Phosphorus in Silicon

1964 • 42 citations

The orientation dependent diffusion of boron in silicon under oxidizing conditions

1969 • 39 citations

Gallium Diffusions into Silicon and Boron-Doped Silicon

1971 • 39 citations

Strain Effects Around Planar Diffused Structures

1968 • 38 citations

Diffusion of Tin into Silicon

1968 • 37 citations

Diffusion of Boron into Silicon

1964 • 36 citations

Diffusion of Gallium in Silicon

1958 • 36 citations

An Analysis of Diffusion in Semiconductors

1957 • 34 citations

The effect of oxidation on anomalous diffusion in silicon

1971 • 33 citations

Approximate Theory of Emitter-Push Effect

1969 • 32 citations

Discovery of anomalous base regions in transistors

1972 • 32 citations

Localized Enhanced Diffusion in NPN Silicon Structures

1965 • 29 citations

Quantitative theory of retarded base diffusion in silicon n-p-n structures with arsenic emitters

1973 • 26 citations

A New Observation of Enhanced Diffusion

1972 • 24 citations

Diffusion in Silicon. I. Effect of Dislocation Motion on the Diffusion Coefficients of Boron and Phosphorus in Silicon

1967 • 24 citations

Distribution of Boron-Induced Defects in Shallow Diffused Surface Layers of Silicon

1966 • 24 citations

Experimental-Condition Dependence of Phosphorus Diffusivity in Silicon

1970 • 24 citations

Simultaneous diffusion of oppositely charged impurities in semiconductors

1966 • 23 citations

Effect of oxidation on orientation-dependent boron diffusion in silicon

1973 • 20 citations

The Orientation Dependence of Boron Diffusion

1970 • 19 citations

Effect of Dislocations on Self-Diffusion in Germanium

1962 • 18 citations

Studies of the Push‐Out Effect in Silicon: II . The Effect of Phosphorus Emitter Diffusion on Gallium‐Base Profiles, Determined by Radiotracer Techniques

1976 • 16 citations

Anomalous diffusion effects in silicon (a review)

1968 • 15 citations

Gallium Diffusion in Silicon

1971 • 14 citations

Retardation of Diffusion by Diffusion-Induced Dislocation in Silicon

1970 • 14 citations

The complete base profile shape in a pushed-out diffused transistor analyzed by radiotracer methods

1974 • 14 citations

BULK DIFFUSION OF PHOSPHORUS IN SILICON IN HYDROGEN ATMOSPHERE

1970 • 13 citations

Boron Diffusion Coefficient Increased by Phosphorus Diffusion

1974 • 13 citations

Cooperative effects between arsenic and boron in silicon during simultaneous diffusions from ion implanted and chemical source predepositions

1974 • 12 citations

Diffusion in Silicon. III. Generation of Excess Vacancies at Climbing Diffusion-Induced Dislocations, and Dislocation-Enhanced Diffusion in (001) Crystals

1968 • 12 citations

Diffusion of antimony in germanium during plastic straining

1965 • 11 citations

The effect of dislocations on diffusion in germanium

1963 • 11 citations

Arsenosilica film source for microwave transistor

1974 • 11 citations

The investigation of phosphorus diffusion in evacuated, sealed tubes using tracer methods

1971 • 10 citations

Studies of the Push‐Out Effect in Silicon: I . Comparison of Sequential Boron‐Phosphorus and Gallium‐Phosphorus Diffusions

1975 • 9 citations

PRE-PRECIPITATION OF PHOSPHORUS IN HEAVILY DOPED SILICON

1970 • 7 citations

The chemical diffusion of P in Si

1975 • 7 citations