Observation of dislocations and microplasma sites in semiconductors by direct correlations of STEBIC, STEM and ELS

Scanning Electron Microscopy/1973

1974 • 227 citations

Scanning Electron Microscopy/1976/I

1977 • 172 citations

Application of scanning transmission electron microscopy to semiconductor devices

1977 • 39 citations

A magnetic prism spectrometer for a high voltage electron microscope

1975 • 10 citations

An improved scanning system for a high-voltage electron microscope

1977 • 10 citations

A direct comparison between sem (ebic) and hvem images of crystal defects in semiconductors

1976 • 9 citations

Threshold voltage for damage in Si under electron bombardment

1977 • 7 citations

Specimen damage by negative oxygen ions from the SEM cathode detected by CdS cathodoluminescence

1978 • 7 citations

Ion damage to the specimen in the SEM studied by the EBIC technique

1978 • 6 citations