Decomposition of silane on Si(111)-(7×7) and Si(100)-(2×1) surfaces below 500 °C

Structural analysis of Si(111)-7×7 by UHV-transmission electron diffraction and microscopy

1985 • 1,302 citations

Scanning tunneling microscopy of Si(001)

1986 • 846 citations

Hydrogen desorption kinetics from monohydride and dihydride species on silicon surfaces

1988 • 545 citations

Infrared spectroscopy of Si(111) surfaces after HF treatment: Hydrogen termination and surface morphology

1988 • 455 citations

New Mechanism for Hydrogen Desorption from Covalent Surfaces: The Monohydride Phase on Si(100)

1989 • 357 citations

Adsorption of atomic hydrogen on clean cleaved silicon (111)

1983 • 349 citations

Atom-resolved surface chemistry studied by scanning tunneling microscopy and spectroscopy

1989 • 285 citations

Desorption kinetics of hydrogen and deuterium from Si(111) 7×7 studied using laser-induced thermal desorption

1988 • 239 citations

Silicon hydride etch products from the reaction of atomic hydrogen with Si(100)

1989 • 232 citations

Adsorption kinetics of SiH4, Si2H6 and Si3H8 on the Si(111)-(7×7) surface

1988 • 212 citations

The pyrolysis of monosilane

1966 • 178 citations

Hydrogen chemisorption on Si(111)-(7×7) and -(1×1) surfaces. A comparative infrared study

1983 • 163 citations

The Kinetics of Silicon Deposition on Silicon by Pyrolysis of Silane

1974 • 161 citations

Adsorption states and adsorption kinetics of atomic hydrogen on silicon crystal surfaces

1985 • 160 citations

Reactions of atomic hydrogen with the Si(111) (7×7) surface by high resolution electron energy loss spectroscopy

1983 • 157 citations

Reactive sticking coefficients for silane and disilane on polycrystalline silicon

1988 • 152 citations

Nucleation and growth of epitaxial silicon on Si(001) and Si(111) surfaces by scanning tunneling microscopy

1989 • 152 citations

A study of nucleation in chemically grown epitaxial silicon films using molecular beam techniques III. Nucleation rate measurements and the effect of oxygen on initial growth behaviour

1967 • 131 citations

Si(001) surface studies using high energy ion scattering

1980 • 126 citations

Hydrogen adsorption on Si(111)–(7×7)

1982 • 104 citations

On the dissociation of diatomic molecules at metal surfaces

1985 • 89 citations

Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: I . Very Low Pressure Deposition

1989 • 85 citations

Silicon homoepitaxial thin films via silane pyrolysis: A HEED and Auger electron spectroscopy study

1972 • 79 citations

Reaction mechanism and kinetics of silane pyrolysis on a hydrogenated amorphous silicon surface

1986 • 78 citations

Anisotropic spread of surface dimer openings in the initial stages of the epitaxial growth of Si on Si{100}

1989 • 75 citations

Absolute coverage and decomposition kinetics of Mono-, Di-, and tri-hydride phases on Si(111)-(7×7)

1989 • 63 citations

Theoretical investigations of elementary processes in the chemical vapor deposition of silicon from silane. Unimolecular decomposition of SiH4

1984 • 58 citations

The role of surface reactions in monosilane pyrolysis

1988 • 58 citations

Reactive sticking coefficient of silane on the Si(111)-(7×7) Surface

1989 • 52 citations

Theory of transition from the dihydride to the monohydride phase on the Si(001) surface

1986 • 49 citations

The surface chemistry of the thermal cracking of silane on silicon (111)

1984 • 41 citations

Kinetic energy enhanced molecular beam epitaxial growth of Si{100}

1988 • 31 citations

The infrared spectrum of the ν1 and ν4 bands of 28SiH3D

1977 • 30 citations

A case for the importance of gas phase initiation and the absence of free radical processes in the thermal decomposition of silane

1984 • 29 citations

NMR study of the plastic crystalline phases of norbornane. An unusual deuterium isotope effect on the hexagonal to cubic phase transition

1985 • 8 citations