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The role of surface reactions in monosilane pyrolysis

Data up to Jan 2025

Published1988
Citations58
References21

Total Citations Per Year

Abstract

References (21)

Theory of thermal unimolecular reactions at low pressures. II. Strong collision rate constants. Applications

1977 • 650 citations

Mechanistic Studies of Chemical Vapor Deposition

1987 • 223 citations

Adsorption kinetics of SiH4, Si2H6 and Si3H8 on the Si(111)-(7×7) surface

1988 • 212 citations

Absolute rate constants for the reaction of silylene with hydrogen, silane, and disilane

1988 • 196 citations

The pyrolysis of monosilane

1966 • 178 citations

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1979 • 175 citations

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1936 • 92 citations

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1985 • 87 citations

Reaction mechanism and kinetics of silane pyrolysis on a hydrogenated amorphous silicon surface

1986 • 78 citations

Silane pyrolysis rates for the modeling of chemical vapor deposition

1987 • 69 citations

Rice-Ramsperger-Kassel-Marcus theoretical prediction of high-pressure Arrhenius parameters by nonlinear regression: application to silane and disilane decomposition

1987 • 61 citations

Silane pyrolysis

1984 • 59 citations

Pyrolysis of monosilane

1970 • 53 citations

Laser powered homogeneous pyrolysis of silane

1985 • 41 citations

Mechanism of the thermal decomposition of monosilane

1980 • 41 citations

Some comments on kinetics and mechanism in the pyrolysis of monosilane

1984 • 40 citations

Summary Abstract: Chemisorption of silanes on the Si(111)-(7×7) surface

1987 • 31 citations

A case for the importance of gas phase initiation and the absence of free radical processes in the thermal decomposition of silane

1984 • 29 citations

Kinetics of the silane and silylene decompositions under shock tube conditions

1978 • 27 citations

Reply to the ‘‘Comment on silane pyrolysis and the insertion of silylene into molecular hydrogen’’

1987 • 7 citations

Comment on silane pyrolysis and the insertion of silylene into molecular hydrogen

1987 • 5 citations

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The role of surface reactions in monosilane pyrolysis (1988) – The Journal of Chemical Physics | Metascience Observatory Explorer