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Simple Optical Devices for Detection of Radiofrequency Oxygen Plasma Stripping of Photoresists

E. O. Degenkolb, James E. Griffiths
DOI: 10.1366/000370277774463193
Applied Spectroscopy

Data up to Jan 2025

Published1977
Citations18
References2
Fields
Materials scienceChemistryPhysicsPhilosophyOpticsOptoelectronicsNanotechnology

Total Citations Per Year

Abstract

References (2)

The identification of molecular spectra

1951 • 2,326 citations

Spectroscopic Study of Radiofrequency Oxygen Plasma Stripping of Negative Photoresists. I. Ultraviolet Spectrum

1976 • 57 citations

Cited By (0)

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Simple Optical Devices for Detection of Radiofrequency Oxygen Plasma Stripping of… (1977) – Applied Spectroscopy | Metascience Observatory Explorer