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Spectroscopic Study of Radiofrequency Oxygen Plasma Stripping of Negative Photoresists. I. Ultraviolet Spectrum
Data up to Jan 2025
Published1976
Citations57
References4
Total Citations Per Year
Abstract
References (4)
The identification of molecular spectra
1964 • 503 citations
The Spectroscopy of Flames
1974 • 383 citations
Novel methods for the production of foamed polymers ii. nucleation of dissolved gas by finely‐divided metals
1965 • 36 citations
Simple Optical Devices for Detection of Radiofrequency Oxygen Plasma Stripping of Photoresists
1977 • 18 citations
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