Thin Films Deposited by Bias Sputtering

Basic Processes of Gaseous Electronics

1956 • 626 citations

Sputtering Yields at Very Low Bombarding Ion Energies

1962 • 296 citations

Effects of Nitrogen, Methane, and Oxygen on Structure and Electrical Properties of Thin Tantalum Films

1964 • 178 citations

Tantalum and Niobium

1960 • 152 citations

The adhesion of evaporated metal films on glass

1961 • 123 citations

Superconductive Films Made by Protected Sputtering of Tantalum or Niobium

1962 • 51 citations

Time-of-Flight Method of Determining Velocities of Sputtered Atoms

1963 • 22 citations

Properties of Thin Antimony Films Deposited in High Vacuum

1961 • 20 citations

Techniques for sputtering single and multilayer films of uniform resistivity

1963 • 11 citations