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Sputtering Yields at Very Low Bombarding Ion Energies

Data up to Jan 2025

Published1962
Citations296
References21

Total Citations Per Year

Abstract

References (21)

Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev

1961 • 771 citations

Radiation Effects in Solids

1953 • 566 citations

Angular Distribution of Sputtered Material

1960 • 202 citations

Influence of the Angle of Incidence on Sputtering Yields

1959 • 150 citations

Sputtering Yields for Normally Incident<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:msup><mml:mrow><mml:mi mathvariant="normal">Hg</mml:mi></mml:mrow><mml:mrow><mml:mo>+</mml:mo></mml:mrow></mml:msup></mml:mrow></mml:math>-Ion Bombardment at Low Ion Energy

1957 • 97 citations

Surface Cleaning by Cathode Sputtering

1960 • 79 citations

The Removal of Thorium from the Surface of a Thoriated Tungsten Filament by Positive Ion Bombardment

1923 • 70 citations

Sputtering Thresholds

1961 • 69 citations

Velocities of Sputtered Atoms

1959 • 64 citations

New Method for Measuring Sputtering in the Region Near Threshold

1961 • 63 citations

Sputtering Thresholds and Displacement Energies

1960 • 57 citations

New Collision Theory of Cathode Sputtering of Metals at Low Ion Energies

1957 • 51 citations

�ber die Kathodenzerst�ubung bei schiefem Aufparall der Ionen

1942 • 50 citations

Momentum Transfer in Sputtering by Ion Bombardment

1954 • 49 citations

Sputtering of Alkali Atoms by Inert Gas Ions of Low Energy

1954 • 47 citations

Threshold Energies for Sputtering and the Sound Velocity in Metals

1954 • 36 citations

Forces on Ion-Bombarded Electrodes in a Low-Pressure Plasma

1960 • 36 citations

Positive-Ion Bombardment of Germanium and Silicon

1957 • 30 citations

Deposit Spot Patterns from Low‐Index Planes of Metal Single Crystals in a New Theory of Cathode Sputtering

1957 • 29 citations

Sputtering at Low Ion Velocities

1954 • 18 citations

Zerst�ubung von Metallen durch Aufprall langsamer Ionen und Messung des Schwellenwertes der Zerst�ubung

1935 • 7 citations

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