Nanooxidation using a scanning probe microscope: An analytical model based on field induced oxidation

General Relationship for the Thermal Oxidation of Silicon

1965 • 3,245 citations

Theory of the oxidation of metals

1949 • 2,755 citations

Semiconductor Surfaces and Interfaces

1993 • 1,022 citations

Modification of hydrogen-passivated silicon by a scanning tunneling microscope operating in air

1990 • 725 citations

Infrared spectroscopy of Si(111) and Si(100) surfaces after HF treatment: Hydrogen termination and surface morphology

1989 • 658 citations

Infrared spectroscopy of Si(111) surfaces after HF treatment: Hydrogen termination and surface morphology

1988 • 455 citations

Fabrication of Si nanostructures with an atomic force microscope

1994 • 366 citations

Reaction of water with hydrofluoric acid treated silicon(111) and (100) surfaces

1989 • 266 citations

Silicon surface passivation by hydrogen termination: A comparative study of preparation methods

1989 • 247 citations

Selective area oxidation of silicon with a scanning force microscope

1993 • 221 citations

Mechanisms of surface anodization produced by scanning probe microscopes

1995 • 137 citations

Nanometer-scale field-induced oxidation of Si(111):H by a conducting-probe scanning force microscope: Doping dependence and kinetics

1995 • 117 citations

Nanolithography on semiconductor surfaces under an etching solution

1990 • 93 citations

Nanometer-scale oxidation of Si(100) surfaces by tapping mode atomic force microscopy

1995 • 82 citations

Low Temperature Oxidation of Silicon in a Microwave‐Discharged Oxygen Plasma

1985 • 79 citations

Pattern generation on semiconductor surfaces by a scanning tunneling microscope operating in air

1991 • 75 citations

Modification of Silicon Surface Using Atomic Force Microscope with Conducting Probe

1993 • 71 citations

Fabrication of nanometer-scale structures using atomic force microscope with conducting probe

1994 • 64 citations

Processing of PbTiO3 thin films. I. In situ investigation of formation kinetics

1996 • 50 citations

Modification of HF-treated silicon (100) surfaces by scanning tunneling microscopy in air under imaging conditions

1992 • 49 citations

Nanometer lithography on silicon and hydrogenated amorphous silicon with low energy electrons

1995 • 48 citations

Selective anodic oxidation of silicon in oxygen plasma

1980 • 39 citations

Chemistry of silicon surfaces after wet chemical preparation: A thermodesorption spectroscopy study

1994 • 37 citations

Maskless patterning of silicon surface based on scanning tunneling microscope tip-induced anodization and chemical etching

1994 • 35 citations

Modification of n-Si(100) Surface by Scanning Tunneling Microscope Tip-Induced Anodization under Nitrogen Atmosphere

1994 • 33 citations

Nanometer scale lithography of silicon(100) surfaces using tapping mode atomic force microscopy

1996 • 33 citations

Surface electrical properties of HF-treated Si(100)

1992 • 31 citations

Scanning tunneling microscope stimulated oxidation of silicon (100) surfaces

1994 • 26 citations

Nanometer-scale modification of the tribological properties of Si(100) by scanning force microscope

1995 • 22 citations

Nanolithography of chemically prepared Si with a scanning tunneling microscope

1991 • 21 citations