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Chemistry of silicon surfaces after wet chemical preparation: A thermodesorption spectroscopy study

G. J. Pietsch, Ulrich Köhler, M. Henzler
DOI: 10.1116/1.587112
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Data up to Jan 2025

Published1994
Citations37
References0
Fields
ChemistryEngineeringChemical engineeringInorganic chemistryOrganic chemistry

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