Influence of low energy ion bombardment on the properties of TiN films deposited by r.f. magnetron sputtering

X-ray line broadening from filed aluminium and wolfram

1953 • 9,048 citations

Calculated elastic constants for stress problems associated with semiconductor devices

1973 • 1,187 citations

Use of the Voigt function in a single-line method for the analysis of X-ray diffraction line broadening

1982 • 1,145 citations

A rapid method for analysing the breadths of diffraction and spectral lines using the Voigt function

1978 • 607 citations

Thermal stresses and cracking resistance of dielectric films (SiN, Si3N4, and SiO2) on Si substrates

1978 • 261 citations

Investigation of reactively sputtered TiN films for diffusion barriers

1986 • 179 citations

Internal stress and adherence of titanium nitride coatings

1986 • 118 citations

Characterization of titanium nitride thin films

1990 • 113 citations

Higher nitrides of hafnium, zirconium, and titanium synthesized by dual ion beam deposition

1986 • 112 citations

A contribution to the study of poisson's ratios and elasticconstants of TiN, ZrN and HfN

1990 • 110 citations

Formation of device-grade epitaxial silicon films at extremely low temperatures by low-energy bias sputtering

1989 • 100 citations

Influence of substrate bias on the composition, structure and electrical properties of reactively d.c.-sputtered TiN films

1982 • 98 citations

Thermal stability of titanium nitride for shallow junction solar cell contacts

1981 • 86 citations

Formation of Copper Thin Films by a Low Kinetic Energy Particle Process

1991 • 80 citations

Structure of Titanium Nitride coatings deposited by physical vapour deposition: A unified structure model

1988 • 55 citations

Study on further reducing the epitaxial silicon temperature down to 250 °C in low-energy bias sputtering

1991 • 49 citations

Bias-induced stress transitions in sputtered TiN films

1986 • 42 citations

Residual stresses and residual stress distributions in TiCN- and TiN-coated steels

1988 • 39 citations

Formation of High Quality Pure Aluminum Films by Low Kinetic Energy Particle Bombardment

1990 • 35 citations

Residual stress and strain distribution anomalies in TiN films deposited by physical vapor deposition

1990 • 33 citations

Residual Stresses and Residual Stress Distributions in TiCN and TiN coated steels

1989 • 31 citations

A study of defects in sputtered TiN coatings by electrochemical polarization

1986 • 25 citations

TiN as a diffusion barrier between CoSi2 or PtSi and aluminum

1983 • 25 citations

Aspects of residual stress measurements in TiN prepared by reactive sputtering

1990 • 17 citations

Properties of magnetron-deposited polycrystalline TiN layers

1990 • 17 citations

X-ray diffraction investigations of adherent and free standing TiN coatings deposited by magnetron sputtering

1990 • 12 citations

Damage enhancement in BF₂⁺ion-implanted silicon

1992 • 2 citations

Structure of TiN Thin Film Grains in Dependence on their Crystallographic Orientation

1991 • 1 citations