Thermal stresses and cracking resistance of dielectric films (SiN, Si3N4, and SiO2) on Si substrates

The tension of metallic films deposited by electrolysis

1909 • 4,668 citations

Calculated elastic constants for stress problems associated with semiconductor devices

1973 • 1,187 citations

Measurement of Strains at Si-SiO2 Interface

1966 • 394 citations

The temperature dependence of stresses in aluminum films on oxidized silicon substrates

1978 • 112 citations

Thermal Expansion of Sputtered Silicon Nitride Films

1969 • 64 citations

Lorentz-Lorenz correlation for reactively plasma deposited Si-N films

1978 • 63 citations

Thermal Expansion Coefficient of a Pyrolitically Deposited Silicon Nitride Film

1967 • 43 citations