Effect of oxygen stoichiometry on the electrical properties of zirconia gate dielectrics

High-κ gate dielectrics: Current status and materials properties considerations

2001 • 5,711 citations

Zur Theorie der unvollkommenen Dielektrika

1913 • 1,376 citations

Dielectrics and Waves

1955 • 1,068 citations

MOS capacitance measurements for high-leakage thin dielectrics

1999 • 489 citations

Electrical and materials properties of ZrO2 gate dielectrics grown by atomic layer chemical vapor deposition

2001 • 205 citations

Electrical and reliability characteristics of ZrO2 deposited directly on Si for gate dielectric application

2000 • 169 citations

Bonding and electronic structure in zirconia pseudopolymorphs investigated by electron energy-loss spectroscopy

1996 • 153 citations

Electrical properties of ZrO2 gate dielectric on SiGe

2000 • 105 citations

Growth and characterization of ultrathin zirconia dielectrics grown by ultraviolet ozone oxidation

2001 • 67 citations

An AES study of the oxidation of polycrystalline zirconium at room temperature and low oxygen pressures

1987 • 46 citations

Growth and modeling of cw-UV induced oxidation of silicon

1994 • 38 citations

Ozone oxidation of silicon

1993 • 19 citations