Atomic force microscope tip-induced local oxidation of silicon: kinetics, mechanism, and nanofabrication

Theory of the oxidation of metals

1949 • 2,755 citations

Modification of hydrogen-passivated silicon by a scanning tunneling microscope operating in air

1990 • 725 citations

Two-dimensional thermal oxidation of silicon. II. Modeling stress effects in wet oxides

1988 • 369 citations

Fabrication of Si nanostructures with an atomic force microscope

1994 • 366 citations

Thermal Oxidation of Silicon in Dry Oxygen Growth‐Rate Enhancement in the Thin Regime: I . Experimental Results

1985 • 306 citations

AFM Fabrication of Sub-10-Nanometer Metal-Oxide Devices with in Situ Control of Electrical Properties

1995 • 237 citations

Selective area oxidation of silicon with a scanning force microscope

1993 • 221 citations

Fabrication of 0.1 μm metal oxide semiconductor field-effect transistors with the atomic force microscope

1995 • 182 citations

Mechanisms of surface anodization produced by scanning probe microscopes

1995 • 137 citations

Nanometer-scale field-induced oxidation of Si(111):H by a conducting-probe scanning force microscope: Doping dependence and kinetics

1995 • 117 citations

Scanning Tunneling Microscope Tip-Induced Anodization for Nanofabrication of Titanium

1994 • 112 citations

Application of STM Nanometer-Size Oxidation Process to Planar-Type MIM Diode

1995 • 99 citations

Modification of Silicon Surface Using Atomic Force Microscope with Conducting Probe

1993 • 71 citations

Fabrication of nanometer-scale structures using atomic force microscope with conducting probe

1994 • 64 citations