a-Si:H Deposition from SiH₄and Si₂H₆rf-Discharges: Pressure and Temperature Dependence of Film Growth in Relation to α-γ Discharge Transition

Plasma potentials of 13.56-MHz rf argon glow discharges in a planar system

1985 • 395 citations

Numerical model of rf glow discharges

1987 • 360 citations

Absolute rate constants for the reaction of silylene with hydrogen, silane, and disilane

1988 • 196 citations

Ion Bombardment Secondaty Electron Maintenance of Steady RF Discharge

1986 • 185 citations

Glow-discharge amorphous silicon: Growth process and structure

1987 • 170 citations

Mechanisms for Power Deposition in Ar/SiH4 Capacitively Coupled RF Discharges

1986 • 169 citations

Neutral radical deposition from silane discharges

1988 • 161 citations

Investigation of the growth kinetics of glow‐discharge hydrogenated amorphous silicon using a radical separation technique

1986 • 151 citations

Power dissipated in low-pressure radio-frequency discharge plasmas

1985 • 139 citations

Surface reaction and recombination of the SiH3 radical on hydrogenated amorphous silicon

1987 • 116 citations

Space-charge-limited conduction for the determination of the midgap density of states in amorphous silicon: Theory and experiment

1984 • 115 citations

Electrical Properties of RF Sputtering Systems

1979 • 113 citations

High resolution absorption and emission spectroscopy of a silane plasma in the 1800–2300 cm−1 range

1982 • 101 citations

Plasma polymerization and deposition of amorphous hydrogenated silicon from rf and dc silane plasmas

1984 • 85 citations

I n s i t u investigation of the growth of rf glow-discharge deposited amorphous germanium and silicon films

1987 • 80 citations

Ion chemistry in silane dc discharges

1985 • 79 citations

On the deposition of amorphous silicon films from glow discharge plasmas of silane

1977 • 78 citations

Rf sputtering–voltage division between two electrodes

1983 • 77 citations

Boltzmann equation analysis of electron swarm behaviour in monosilane

1986 • 69 citations

Positive and negative ions in silane and disilane multipole discharges

1984 • 65 citations

High-rate deposition of amorphous hydrogenated silicon from a SiH4 plasma

1984 • 65 citations

Electron kinetics of silane discharges

1983 • 63 citations

Influence of Scattering and Ionization on RF Impedance in Glow Discharge Sheaths

1979 • 62 citations

Electrical properties of planar rf discharges for dry etching

1985 • 58 citations

On the balance between silylene and silyl radicals in rf glow discharges in silane: The effect on deposition rates of a-Si:H

1987 • 58 citations

A model of radio frequency planar discharges

1986 • 41 citations

Preparations of a-Si:H from Higher Silanes (Si_nH_2n+2) with the High Growth Rate

1981 • 37 citations

Effects of rf power and reactant gas pressure on plasma deposited amorphous hydrogenated silicon

1981 • 33 citations

Amorphous silicon deposition rates in diode and triode discharges

1986 • 32 citations

New mode of plasma deposition in a capacitively coupled reactor

1984 • 30 citations

Influence of Deposition Conditions on Properties of Hydrogenated Amorphous Silicon Prepared by RF Glow Discharge

1985 • 27 citations

Measurement of the ionisation and attachment coefficients in monosilane and disilane

1986 • 26 citations

Analysis of the cathode fall in high-voltage low-current gas discharges

1978 • 25 citations

Deep-level traps in low-dose boron-implanted and low-temperature annealed silicon

1980 • 21 citations

The influence of substrate temperature on the deposition rate and optical properties of a-Si:H thin films prepared by RF-glow discharge

1987 • 18 citations

Substrate temperature dependence of SiH concentration in silane plasmas for amorphous silicon film deposition

1987 • 11 citations

Silane plasma and surface processes in amorphous silicon deposition

1985 • 9 citations

Effect of some process parameters on the deposition mechanism of ASi:H film

1985 • 7 citations

Anomalous deposition rate dependence of hydrogenated amorphous silicon on substrate temperature

1987 • 5 citations