Back to search

Rf sputtering–voltage division between two electrodes

C. M. Horwitz
DOI: 10.1116/1.572311
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Data up to Jan 2025

Published1983
Citations77
References0
Fields
Materials scienceChemistryPhysicsEngineeringOptoelectronicsAtomic physicsElectrical engineering

Total Citations Per Year

Abstract

References (0)

No references found

Cited By (0)

Loading...
Rf sputtering–voltage division between two electrodes (1983) – Journal of Vacuum Science & Technology A Vacuum Surfaces and Films | Metascience Observatory Explorer