The role of the ion-solid interaction in ion-beam-induced deposition of gold

Adsorption of Gases in Multimolecular Layers

1938 • 25,908 citations

Data Reduction and Error Analysis for the Physical Sciences

1969 • 13,865 citations

A Monte Carlo computer program for the transport of energetic ions in amorphous targets

1980 • 4,625 citations

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

1969 • 3,398 citations

Inorganic Chemistry: Principles of Structure and Reactivity

1972 • 2,831 citations

Kinetics and Mechanism

1961 • 2,376 citations

Defects and Radiation Damage in Metals

1969 • 608 citations

A review of laser–microchemical processing

1983 • 369 citations

High density cascade effects

1981 • 312 citations

Thermal spikes and activated processes

1976 • 300 citations

High-resolution electron-beam induced deposition

1988 • 241 citations

Fundamental aspects of ion beam mixing

1986 • 211 citations

Theory of thermal sputtering

1977 • 155 citations

New selective deposition technology by electron-beam induced surface reaction

1986 • 141 citations

Ion Beam Assisted Deposition of Metal Organic Films Using Focused Ion Beams

1984 • 125 citations

Focused ion beam induced deposition of gold

1986 • 122 citations

Molecular dynamics simulation of low energy displacement cascades in Cu

1983 • 120 citations

Influences of thermal spikes in ion beam mixing

1985 • 85 citations

X-ray mask repair with focused ion beams

1990 • 76 citations

Focused ion beam induced deposition of platinum for repair processes

1991 • 72 citations

Electron beam induced surface nucleation and low-temperature decomposition of metal carbonyls

1988 • 70 citations

Applications of focused ion beams

1983 • 60 citations

Maskless ion beam assisted deposition of W and Ta films

1986 • 59 citations

Application of a focused ion beam system to defect repair of VLSI masks

1985 • 45 citations

The role of gas adsorption in ion-beam-induced deposition of gold

1989 • 24 citations

I n s i t u measurement of ion-beam-induced deposition of gold

1989 • 20 citations

Molecular structure of dimethyl(2,4-pentanedionato)gold(III)

1990 • 17 citations

Aluminum-Line Cutting End-Monitor Utilizing Scanning-Ion-Microscope Voltage-Contrast Images

1985 • 11 citations