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The adsorption of oxygen on a clean silicon surface

Data up to Jan 2025

Published1973
Citations66
References20

Total Citations Per Year

Abstract

References (20)

Surface Vibrations of Silicon Detected by Low-Energy Electron Spectroscopy

1971 • 251 citations

Ellipsometry in the sub-monolayer region

1969 • 196 citations

Oxidation of Si and GaAs in air at room temperature

1972 • 166 citations

Analysis of the outermost atomic layer of a surface by low-energy ion scattering

1973 • 139 citations

Measurement of oxygen adsorption on silicon by ellipsometry

1965 • 115 citations

An investigation of silicon-oxygen interactions using Auger electron spectroscopy

1971 • 100 citations

Contaminants on chemically etched silicon surfaces: LEED-Auger method

1970 • 92 citations

Ellipsometry and the clean surfaces of silicon and germanium

1971 • 85 citations

The adsorption of oxygen on clean silicon surfaces

1960 • 61 citations

Kinetics and mechanism of oxygen adsorption on single crystals of germanium

1962 • 59 citations

The interaction of oxygen with clean silicon surfaces

1958 • 50 citations

Ellipsometric study of adsorption complexes on silicon

1971 • 49 citations

AUGER ELECTRON SPECTROSCOPY MADE QUANTITATIVE BY ELLIPSOMETRIC CALIBRATION

1971 • 45 citations

Oxygen sticking coefficients on clean (111) silicon surfaces

1969 • 34 citations

Measurements of oxygen adsorption on Si(111) surfaces by LEED

1969 • 27 citations

Study of silicon-oxygen interaction with the statical method of secondary ion mass spectroscopy (SIMS)

1973 • 26 citations

Calorimetric study of the adsorption of oxygen and gases HxA on germanium and silicon

1969 • 14 citations

Low-Energy Electron-Diffraction and Surface Conductance Studies of Surface Reaction of Germanium with Oxygen

1971 • 12 citations

Interactions of Si(111) Surfaces with Oxygen by Electron Bombardment Surface Ion Desorption Technique

1972 • 6 citations

Infra-red studies of oxygen adsorbed on evaporated germanium films

1972 • 5 citations

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The adsorption of oxygen on a clean silicon surface (1973) – Surface Science | Metascience Observatory Explorer