Ellipsometric Technique for Obtaining Substrate Optical Constants
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Abstract
References (16)
An advanced treatise on physical chemistry
1949 • 400 citations
Determination of the Properties of Films on Silicon by the Method of Ellipsometry
1962 • 253 citations
Optical Constants and Reflectance and Transmittance of Evaporated Aluminum in the Visible and Ultraviolet*
1961 • 241 citations
Effect of a Thin Surface Film on the Ellipsometric Determination of Optical Constants*
1964 • 88 citations
Tunneling in MIS structures—I
1967 • 74 citations
The validity of Drude's optical method of investigating transparent films on metals
1935 • 54 citations
Ellipsometric Method for the Determination of All the Optical Parameters of the System of an Isotropic Nonabsorbing Film on an Isotropic Absorbing Substrate Optical Constants of Silicon*
1969 • 52 citations
An Optical Investigation of Oxide Films on Metals
1939 • 48 citations
Formulas for Using Wave Plates in Ellipsometry*
1967 • 36 citations
Ellipsometric investigations of oxide films on Ga As
1964 • 32 citations
Ellipsometry with Non-Ideal Compensators
1967 • 32 citations
Anodization of Vanadium in Acetic Acid Solutions
1968 • 29 citations
Tunneling in MIS structures—II
1967 • 26 citations
Optical Properties of Clean Molybdenum*
1964 • 20 citations
USE OF AN ELLIPSOMETER TO DETERMINE SURFACE CLEANLINESS AND MEASUREMENT OF THE OPTICAL AND DIELECTRIC CONSTANTS OF InSb AT λ = 5461 Å
1965 • 14 citations
The Optical Constants of Polished and Sputtered Molybdenum Surfaces
1934 • 7 citations
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