Laser detection of diatomic products of plasma sputtering and etching

Constants of diatomic molecules

1979 • 5,108 citations

Plasma etching—A discussion of mechanisms

1979 • 559 citations

Vibrational and Rotational Relaxation in Gases

1978 • 404 citations

Optical techniques in plasma diagnostics

1984 • 152 citations

Measurement of spatially resolved gas-phase plasma temperatures by optical emission and laser-induced fluorescence spectroscopy

1983 • 115 citations

Laser diagnostics of plasma etching: Measurement of Cl+2 in a chlorine discharge

1982 • 104 citations

Ion dynamics of rf plasmas and plasma sheaths: A time-resolved spectroscopic study

1984 • 100 citations

Detection of CF2 radicals in a plasma etching reactor by laser-induced fluorescence spectroscopy

1982 • 71 citations

Spatially resolved laser-induced fluorescence and optical emission spectroscopy of carbon tetrachloride glow discharges

1983 • 67 citations

Laser Optogalvanic Detection of Molecular Ions

1983 • 50 citations

Summary Abstract: Laser-induced fluorescence diagnostics of glow discharges: Spatially resolved concentration profiles

1983 • 35 citations

Rotational and vibrational state population distributions in excited CH radicals sputtered from a chemisorption layer on silicon

1978 • 28 citations

Light emission from excited molecules sputtered from chemisorption layers on silicon

1975 • 27 citations

Thermal nitridation of silicon in nitrogen plasma

1983 • 16 citations

Comment on "Molecule Formation During Sputtering by Two-Body Associative Ionization with Diabatic Curve Crossing

1983 • 10 citations

Snowdon and Heiland Respond

1983 • 9 citations